Cryogenic liquid Argon purifier – ULTRAL LAr
An exclusive Air Liquide solution for the direct purification of liquid argon to the level of ppb
ULTRALTM LAr is a purifier specially designed to purify liquid argon upstream of a liquid storage unit. The adsorption technology employed is used to eliminate impurities such as O2, N2, CH4 down to ppb level. The purification principle is based on cryo-trapping and the chemisorption of the impurities on a bed of high performance adsorbent.
Key benefits
- Cost-effective solution for purifying liquid argon directly
- Easy-to-use manual purifier: only one operator is needed!
- Adsorbent bed that can be regenerated in only 9h
- 3µm particle filtration at purifier output
Main technical characteristics
- Working pressure: < 17.5 barg
- Flow rate: up to 16,000 L/h
- Dimensions (Lxlxh): 2,000x1,400x3,000 mm
- Autonomy: depends on the level of impurity
O2 (ppm) |
N2(ppm) |
CH4 (ppm) |
Capacity (L) |
3 | 2 | 1 | 170,000 |
Performance
Impurities |
Input (ppb) |
Input (ppb) |
O2 |
500 |
< 1 |
N2 |
200 |
< 1 |
CH4 |
5 |
< 1 |
Standards
- CE - ASME - AQSIQ (China)
References
- STMICROELECTRONIC
- MICRON
- IBM
- PHILIPS
- IMEC
Contact Us
For more information, find on this page your key contacts and our contact form.
Industry
Air Liquide supports its industrial customers by offering its expertise and its cutting edge technologies so they can maintain the advantage in their field.