Ultra-pure purifiers - Air Water Mechatronics

In order to meet the demand of the ultra-pure gas market and to propose an offer optimized to the needs of its electronics customers, Air Liquide proposes, in addition to its ULTRAL^TM cryogenic purifiers offer, all the purification solutions of the manufacturer Air Water Mechatronics. 

According to the applications, the impurities to be eliminated or the flow rates, the choice of the scrubbers can then be oriented towards various technologies going from ppb to sub-ppb : UIP (adsorption), UOP (catalytic + adsorption), URT (getter), JLS (Palladium membrane). 

• UIP : series allowing the removal at room temperature of classical impurities (H20, CO, CO2, O2, H2) in inert gases (N2, He, Ar, etc.)
• UOP : specific series for oxygen purification. Similar to IPU but with an additional reactor for the removal of CH4 and CO
• URT, UHG : series using a high performance heated getter allowing the removal of classical impurities including the most difficult ones like N2 and CH4 in inert gases (URT) or hydrogen (UHG)
• JLS : series of Hydrogen scrubbers with heated Palladium membrane

Key benefits

Easy-to-use automatic purifier with touch screen control

IPU models: 2 or 3 purification columns operating in parallel to ensure continuous and automatic purification 24/7. Automatic regeneration

Models URT, UHG: Extended cartridge life compared to traditional getters: 20,000H under standard conditions

The alliance of one of the world leaders in ultra-pure gas purification with one of the world leaders in gases

Standards

CE - ASME - AQSIQ (China) - HPGSL (Japan)

References

STMICROELECTRONIC

GLOBALFOUNDRIES 

ATMEL

IMEC